Product Specifications

• Architecture: Combines a high-performance spectrometer and a process computer into one integrated, compact unit

• Optics: Employs a scientific-grade, 1024-element Charge-Coupled Device (CCD) array for high precision, multi-channel spectroscopy.

• Software: (version 6.2+ and 7.2+), which provides algorithms for etch depth, film thickness, and reliable endpoint determination

• Industrial Integration: Supports various tool integrations via Ethernet, RS-232, and digital I/O

• Embedded System: Runs stable embedded operating systems (such as Windows 7 Embedded), which lowers computer maintenance issues and reduces required cabling.

• Optical Endpoint Detection: Tracking moving wafers and using plasma differences to measure critical endpoints.

• Process Diagnostics: Providing real-time measurement and fault detection for vacuum and dry-etch chambers.

The SD1024XL-T is a high-performance embedded/semiconductor spectrometer manufactured by Verity Instruments, frequently utilized as a semiconductor controller. It functions as an optical emission monitor for real-time process diagnostics, fault detection, and high-precision endpoint detection in harsh manufacturing environments like plasma etching. 

Designed specifically for demanding semiconductor process applications. It integrates a high-performance spectrometer and a process computer into a single compact enclosure to reduce space and cabling requirements. 

In 1999, Verity introduced the SD1024™ spectrometer, developed for the demanding requirements of semiconductor process control. Its optical system employs a 1024-element, scientific-grade CCD sensor array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024 include its excellent UV response, stability against deterioration under UV exposure, high sensitivity, wide dynamic range and superior output linearity.

SKUS3

Qty: 1

Alternative Part No. 1013505, SD1024. SD1024XL T, SD1024D Series

Product Manual

SD1024-SERIES-DATASHEET-PART-NO-1013505.pdf