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Email: sales@esi-technologies.com
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Location: SKUS3
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Product Specifications
Architecture: Combines a high-performance spectrometer and a process computer into one integrated, compact unit
Optics: Employs a scientific-grade, 1024-element Charge-Coupled Device (CCD) array for high precision, multi-channel spectroscopy.
Software: (version 6.2+ and 7.2+), which provides algorithms for etch depth, film thickness, and reliable endpoint determination
Industrial Integration: Supports various tool integrations via Ethernet, RS-232, and digital I/O
Embedded System: Runs stable embedded operating systems (such as Windows 7 Embedded), which lowers computer maintenance issues and reduces required cabling.
Optical Endpoint Detection: Tracking moving wafers and using plasma differences to measure critical endpoints.
Process Diagnostics: Providing real-time measurement and fault detection for vacuum and dry-etch chambers.
The SD1024XL-T is a high-performance embedded/semiconductor spectrometer manufactured by Verity Instruments, frequently utilized as a semiconductor controller. It functions as an optical emission monitor for real-time process diagnostics, fault detection, and high-precision endpoint detection in harsh manufacturing environments like plasma etching.
Designed specifically for demanding semiconductor process applications. It integrates a high-performance spectrometer and a process computer into a single compact enclosure to reduce space and cabling requirements.
In 1999, Verity introduced the SD1024™ spectrometer, developed for the demanding requirements of semiconductor process control. Its optical system employs a 1024-element, scientific-grade CCD sensor array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024 include its excellent UV response, stability against deterioration under UV exposure, high sensitivity, wide dynamic range and superior output linearity.
Alternative Part No. 1013505, SD1024. SD1024XL T, SD1024D Series
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